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On the Effect of Surface Texture and Nanoscale Surface Oxides on the Optical and Mechanical Properties Of Silicon Single Crystals and Mems Thin Films

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Abstract

This dissertation presents the combined results of analytical, computational and experimental study of the effects of surface texture and nanoscale surface oxides on the optical and mechanical properties of silicon single crystals and MEMS thin films.

The first part of this work is focused on the analytical modeling of the reflectance of flat and textured silicon substrates. The model was used to study the reflection behavior of textured silicon surfaces under non-normal incidence.

By characterizing the incident light and facets of the silicon wafer with vector geometry, dot products and Phong’s reflection model were used to determine the reflection angles between incident light rays and pyramidal facets.

The possible optical interactions are considered for a wide range of pyramidal geometries and light incidence angles that are relevant to the exposure of textured silicon surfaces to incident sunlight. Furthermore, the model was used to investigate the possibility of secondary reflection, for the full range of incidence angles to the substrate.

Introduction

Silicon (Si) is one of the most abundant of elements and an essential ingredient of a large number of minerals that make up the Earth’s surface [1]. It was first isolated in 1824 by the Swedish chemist Jöns Jacob Berzelius who also discovered Cerium, Selenium and Thorium [2, 3].

Crystalline silicon was first produced in 1854 by Henri Deville using electrolysis [3]. Since that time, it has been the most important element used in the semiconductor industry [4].

Without a supply of this important element, it would be impossible to make the range of high quality computers, calculators, cell phones, radios, etc.

It is, therefore, a key element that modern industrial societies rely upon. Silicon is used in various ways in microelectronics such as computer chips, with one example being the metal-oxide-semiconductor field effect transistor (MOSFET), the basic switch in modern electronics and computing [4, 5].

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